[pho.to.li.thog.ra.phy] n [ISV] (1856) 1: lithography in which photographically prepared plates are used
2: a process involving the photographic transfer of a pattern to a surface for etching (as in producing an integrated circuit) -- pho.to.lith.o.graph n or vt -- pho.to.lith.o.graph.ic adj -- pho.to.lith.o.graph.i.cal.ly adv