IMPLANTATION

1) имплантация 2) ионная имплантация, ионное легирование • - base implantation - channel implantation - channel stop implantation - collector implantation - double implantation - double-ion implantation - drain implantation - emitter implantation - field-oxide implantation - field implantation - gate implantation - hot ion implantation - ion-beam implantation - ion implantation - localized implantation - local implantation - masked ion implantation - maskless implantation - multiple implantation - n-type ion implantation - n-type implantation - p-type ion implantation - p-type implantation - self-aligned ion implantation - shallow implantation - single-ion implantation - source implantation