1) имплантация
2) ионная имплантация, ионное легирование
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- base implantation
- channel implantation
- channel stop implantation
- collector implantation
- double implantation
- double-ion implantation
- drain implantation
- emitter implantation
- field-oxide implantation
- field implantation
- gate implantation
- hot ion implantation
- ion-beam implantation
- ion implantation
- localized implantation
- local implantation
- masked ion implantation
- maskless implantation
- multiple implantation
- n-type ion implantation
- n-type implantation
- p-type ion implantation
- p-type implantation
- self-aligned ion implantation
- shallow implantation
- single-ion implantation
- source implantation